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Michał Mazur
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Publications (1)
Proceedings Article | 24 June 2024 Presentation + Paper
Optical and structural properties of silicon nitride thin films deposited by plasma enhanced chemical vapor deposition for high reflectance optical mirrors
Kirstin Saunders, Michał Mazur, Caspar Clark, Des Gibson, Carlos Garcia Nuñez
Proceedings Volume 13020, 130200T (2024) https://doi.org/10.1117/12.3022947
KEYWORDS: Silicon nitride, Thin films, Plasma enhanced chemical vapor deposition, Silicon, Refractive index, Thin film coatings, Optical coatings, Mirrors, Coating stress, Semiconducting wafers
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