Dr. Michael E. Walsh Profile

Dr. Michael E. Walsh

Vice President at LumArray Inc

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Publications (2)

Proceedings Article | 15 November 2005 Open Access

Enabling nanoscale science and engineering via highly flexible low-cost maskless lithography

Henry Smith, Rajesh Menon, Amil Patel, David Chao, Michael Walsh, G. Barbastathish

Proceedings Volume 6002, 60020B (2005) https://doi.org/10.1117/12.632117

KEYWORDS: Lithography, Electron beam lithography, Zone plates, Maskless lithography, Photons, Nanolithography, Electrons, Silicon, Electronics, Nanoparticles

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Proceedings Article | 6 May 2005 Paper

Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning

Rajesh Menon, Amil Patel, David Chao, Michael Walsh, Henry Smith

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598742

KEYWORDS: Photomasks, Lithography, Maskless lithography, Zone plates, Semiconducting wafers, Optical lithography, Modulators, Modulation, Photomicroscopy, Manufacturing

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