Mr. Michael E. Adel Profile

Michael E. Adel

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Publications (2)

Proceedings Article | 22 November 2023 Presentation

Advances in edge placement error metrology in the era of stochastics

Chris Mack, Mike Adel

Proceedings Volume PC12750, PC127500D (2023) https://doi.org/10.1117/12.2688228

KEYWORDS: Stochastic processes, Metrology, Modeling, Uncertainty analysis, Ranging, Optical lithography, Lithography, Failure analysis, Error analysis, Critical dimension metrology

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Proceedings Article | 27 April 2023 Presentation + Paper

Overlay and edge placement error metrology in the era of stochastics

Chris Mack, Michael Adel

Proceedings Volume 12496, 1249609 (2023) https://doi.org/10.1117/12.2658735

KEYWORDS: Stochastic processes, Critical dimension metrology, Overlay metrology, Optical lithography, Metrology, Data modeling, Lithography

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