Cavity optomechanics have become a promising route towards the development of ultrasensitive sensors for a wide range of applications including mass, chemical and biological sensing. In this study, we demonstrate the potential of Very Large Scale Integration (VLSI) with state-of-the-art low-loss performance silicon optomechanical microdisks for sensing applications. We report microdisks exhibiting optical Whispering Gallery Modes (WGM) with 1 million quality factors, yielding high displacement sensitivity and strong coupling between optical WGMs and in-plane mechanical Radial Breathing Modes (RBM). Such high-Q microdisks with mechanical resonance frequencies in the 102 MHz range were fabricated on 200 mm wafers with Variable Shape Electron Beam lithography. Benefiting from ultrasensitive readout, their Brownian motion could be resolved with good Signal-to-Noise ratio at ambient pressure, as well as in liquid, despite high frequency operation and large fluidic damping: the mechanical quality factor reduced from few 103 in air to 10’s in liquid, and the mechanical resonance frequency shifted down by a few percent. Proceeding one step further, we performed an all-optical operation of the resonators in air using a pump-probe scheme. Our results show our VLSI process is a viable approach for the next generation of sensors operating in vacuum, gas or liquid phase.
A fundamental limitation of precision radial velocity measurements is the accuracy and stability of the calibration source. Here we present a low-cost alternative to more complex laser metrology based systems that utilises a single-mode fibre Fabry-Perot etalon. There are three key elements on this photonic comb: i) an optical fibre etalon with thermo-electric coolers; ii) a Rubidium Saturation Absorption Spectroscopy (SAS) setup; and iii) an optical fibre switch system for simultaneous laser locking of the etalon. We simultaneously measure the Rubidium D2 transitions around 780.2 nm and the closest etalon line. A PID loop controls the etalon temperate to maintain the position of its peak with an RMS error of <10cm/s for 10 minute integration intervals in continous operation. The optical fibre switch system allows for a time multiplexed coupling of the etalon to a spectrograph and SAS system.
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