Mr. Mario Nitzsche Profile

Mario Nitzsche

at Fraunhofer-Institut für Photonische Mikrosysteme IPMS

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Proceedings Article | 12 March 2024 Presentation + Paper

Characterization of MEMS piston mirror arrays with comb drive actuator

S. Francés González, M. Nitzsche, A. Bajpai, A. Pranti, A. Neudert, P. Duerr

Proceedings Volume 12899, 128990D (2024) https://doi.org/10.1117/12.3000871

KEYWORDS: Actuators, Mirrors, Design, Simulations, Spatial light modulators, Micromirrors, Holographic displays, Microelectromechanical systems, Holography, Fabrication

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Nowadays, virtual, augmented and mixed reality applications are becoming more and more widespread. With this, the requirements for image quality are getting more demanding, leaving room for improvement of the user experience of the existing systems. While many research groups and companies try to improve on fixed-focus stereo image systems, we propose to make use of real holography as the best possible solution providing all depth cues automatically in a consistent way. Within such holographic display systems, a spatial light modulator (SLM) is re-shaping the incident light generating the desired images. As SLMs with the required properties are not commercially available today, a novel device is being developed within the Horizon 2020 ’REALHOLO’ project funded by the European Union: a MEMS micromirror Array (MMA) with 8 million phase-shifting pixels based on a novel comb drive micro actuator concept. Earlier theoretical work and simulations had showed clear perspectives for a superior performance in comparison to other SLM technologies allowing high frame rates and high precision wave front modulation. By now the first samples of proof-of-concept MMA chips have been fabricated and in this paper we present experimental characterization results: microscope and SEM images, quasi-static response curves measured by white light interferometry (WLI) as well as the dynamic properties like resonance frequency and damping measured by laser doppler vibrometry (LDV). In addition an addressing approach for a minimum mirror settling time is also investigated. We discuss the impact of fabrication tolerances on the overall precision together with the response curve dependency on design parameters and compare the experimental results to simulations.

Proceedings Article | 15 March 2023 Poster + Paper

Improved comb drive design for MEMS piston mirror arrays

Mario Nitzsche, Peter Duerr, Andreas Neudert

Proceedings Volume 12434, 124340R (2023) https://doi.org/10.1117/12.2649743

KEYWORDS: Actuators, Design and modelling, Simulations, Mirrors, Microelectromechanical systems, Spatial light modulators, Lithography, Crosstalk, Computer generated holography, Electrodes

Read Abstract +

MEMS (micro electro mechanical system) based piston mirror arrays are key elements for real time computer generated holograms (CGH) in visualisation technologies like virtual, augmented and mixed reality (VR/AR/MR). The EU funded Project REALHOLO is developing a spatial light modulator (SLM) that is based on comb drive MEMS actuators that can fulfil the tight requirements of the optical and mechanical performance and the high level of integration. A previous design already outlined perspectives for a superior performance in comparison to other approaches for high frequency and high precision wave front modulation, but has restrictions due to the resolution and feature size of the i-line lithography system used for manufacturing. This paper discusses the optimisation of the design applying an advanced manufacturing process using DUV lithography that allows smaller features and therefore offers additional design options. By introducing an improved comb drive geometry the electrostatic force was significantly increased, which allowed the optimisation of other geometries, like horizontal and vertical gaps and additional shielding structures, for an even more linear actuator response and reduced crosstalk. The electrostatic and structural FEM simulations will show the significant improvements in overall performance, compared to the previous iteration and other types of SLMs. The improved actuator can potentially extend the field of application from the desired automotive driver assistance holographic 3D display to head mounted displays for VR, AR and MR applications as well as other technologies like material processing.

Proceedings Article | 2 March 2022 Presentation + Paper

MEMS piston mirror arrays for computer generated holography

P. Dürr, A. Neudert, M. Nitzsche, C. Hohle, H. Stolle, J. Pleikies

Proceedings Volume 12013, 1201306 (2022) https://doi.org/10.1117/12.2608081

KEYWORDS: Actuators, Mirrors, Spatial light modulators, Microelectromechanical systems, Computer generated holography, Holography, Micromirrors, 3D displays, Finite element methods, Mixed reality

Read Abstract +

Computer generated holography (CGH) offers the best possible solution for very interesting applications like virtual, augmented and mixed reality. To get the images from the computer into the real world, spatial light modulators (SLMs) are required that fulfil very demanding specifications. Unfortunately, none of the currently available kinds of SLMs can meet this challenge fully. Within the European Union funded Project REALHOLO we are therefore developing a novel kind of MEMS (micro electro mechanical system) SLM especially for CGH applications. The challenge is to modulate the phase of incoming coherent light with millions of individually controllable pixels. The pixels have to be only a few micrometers in size for acceptable diffraction angles and still have a stroke range of half the wavelength of visible light, about 350nm. Within this range, each pixel needs to be set very precisely to one of many deflection levels at frame rates of more than one kHz. This paper discusses the challenge and our solution: an innovative MEMS comb drive actuator array, monolithically integrated on top of a CMOS backplane. The advantages of this design are compared to other types of SLMs and its superior performance is shown by FEM simulations. We also discuss the impact of effects like charging and fabrication imperfections on the deflection precision. Our newly developed MEMS technology and SLM will also enable many other applications that may benefit from the fast and precise phase modulation by a large number of pixels, like wave front shaping or quickly re-programmable diffractive optical elements (DOEs).

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