KEYWORDS: Optical coherence tomography, 3D image processing, Semiconducting wafers, Glasses, 3D metrology, Cameras, Modulation transfer functions, 3D imaging standards, Refractive index, 3D image reconstruction
For many applications of optical coherence tomography systems (OCT) optical resolution is a key feature. We present a method to determine the system transfer function (STF) of a full field high definition OCT (HD OCT). The measurement of the system sharpness is performed using structured glass edge phantoms, with a reflectivity adapted to the system dynamic range. After aligning the phantom within the field of view, a 3D image is recorded. A polynomial fit is applied to the 3D cube to extract the surface of the edge in space. In that way the image field curvature as well as the orientation of the surface in space are obtained. In a second step the intensity distribution of that surface is projected onto a plane using the polynomial fit parameters. Such a reconstructed planar phantom image allows a true 3D sharpness evaluation using standard MTF analysis. In this way the technical image sharpness during production can be monitored. This procedure- to our knowledge
- was applied for the first time to a full 3D OCT (SKINTELL ). Such a HD-OCT is capable of producing a full 3D image with more than 325k parallel A-scans in only one fast sweep. The optimum sharpness in every depth position is ensured during the sweep by focus tracking.
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