Mr. Manfred Dirscherl Profile

Manfred Dirscherl

at Bayerisches Laserzentrum gGmbH

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 18 November 2003 Paper

Laser adjustable actuators for high-accuracy positioning of micro components

Gerd Esser, Michael Schmidt, Manfred Dirscherl

Proceedings Volume 5063, (2003) https://doi.org/10.1117/12.540461

KEYWORDS: Actuators, Coating, Silicon, Laser ablation, Manufacturing, Micromachining, Pulsed laser operation, Laser processing, Laser systems engineering, Tolerancing

Read Abstract +

Proceedings Article | 17 October 2003 Paper

New developments in laser processing of silicon devices

Manfred Dirscherl, Gerd Esser, Stefan Kaufmann, Manfred Geiger

Proceedings Volume 4977, (2003) https://doi.org/10.1117/12.479411

KEYWORDS: Silicon, Semiconductor lasers, Laser processing, Laser cutting, Laser ablation, Absorption, Actuators, Laser welding, Pulsed laser operation, Nd:YAG lasers

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years