Mr. Maarten Willems Profile

Maarten Willems

Business Development Director at imec

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Publications (1)

Proceedings Article | 13 March 2015 Paper

Direct comparison of GaN-based e-mode architectures (recessed MISHEMT and p-GaN HEMTs) processed on 200mm GaN-on-Si with Au-free technology

Denis Marcon, Marleen Van Hove, Brice De Jaeger, Niels Posthuma, Dirk Wellekens, Shuzhen You, Xuanwu Kang, Tian-Li Wu, Maarten Willems, Steve Stoffels, Stefaan Decoutere

Proceedings Volume 9363, 936311 (2015) https://doi.org/10.1117/12.2077806

KEYWORDS: Field effect transistors, Etching, Gallium nitride, Dielectrics, Interfaces, Semiconducting wafers, Metals, Transistors, Metalorganic chemical vapor deposition, Atomic layer deposition

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