Ultraviolet (UV) solid-state laser has become an effective tool of processing hard and brittle materials due to its short wavelength, small spot and better beam quality. In this paper, experiment on the microgroove of hard and brittle sapphire wafers was carried out using a solid-state nanosecond laser with a wavelength of 266 nm. Samples were detected by scanning electron microscope(SEM) and optical microscope. The microgrooves on sapphire wafers were fabricated with different laser parameters through linear scanning experiments. The effects of laser energy, number of laser scans, and scanning speed on groove width and depth were investigated.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.