Different phase structural CdTe films deposited onto 7101 glass substrates by magnetron sputtering were
studied as a function of deposition methods at room temperature of 25±1. It was observed that when the
deposition power intensity was kept at 0.884w/cm2, and deposition methods were selected among normal
method, discrete method and continuous substrate rotation method. Phase structural properties of these
films were showed a mix structure of both zinc-blende cubic and wurtzite hexagonal phase, a single
structure of cubic phase with the strong (111) preferential orientation, or amorphous CdTe thin films,
respectively. Deposition methods played a critical role in determining phase structure of CdTe films.
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