Prof. Liang-Chia Chen Profile

Prof. Liang-Chia Chen

Distiguished Professor at National Taiwan Univ

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Author

Publications (21)

Proceedings Article | 18 June 2024 Presentation + Paper

Advancements in metrology for advanced semiconductor packaging

Wei-Hsin Chein, Gaurav Pandey, Surajit Das, Liang-Chia Chen

Proceedings Volume 12997, 129970R (2024) https://doi.org/10.1117/12.3024745

KEYWORDS: Metrology, Advanced packaging, 3D metrology, Scanning electron microscopy, X-rays, Atomic force microscopy, Silicon, X-ray microscopy, Semiconductors, Overlay metrology

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Proceedings Article | 10 April 2024 Poster + Paper

AI-powered deconvolution-based super-resolution imaging for semiconductor OCD metrology and precise stage positioning

Yu-Ting Cheng, Wei-Yun Lee, Ming-Jie Liu, Wei-Hsin Chein, Liang-Chia Chen

Proceedings Volume 12955, 129553D (2024) https://doi.org/10.1117/12.3010986

KEYWORDS: Point spread functions, Image processing, Image deconvolution, Deconvolution, Systems modeling, Resolution enhancement technologies, Super resolution, Scanning electron microscopy, Image enhancement, Semiconductors

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Proceedings Article | 9 April 2024 Poster + Paper

AI-enhanced optical critical dimension metrology for high aspect ratio structures in semiconductor advanced packaging

Fu-Sheng Yang, Min-Ru Wu, Yen-Hung Hung, Zih-Ying Fu, Liang-Chia Chen

Proceedings Volume 12956, 129560Y (2024) https://doi.org/10.1117/12.3012984

KEYWORDS: Scatterometry, Deep ultraviolet, Short wave infrared radiation, Artificial neural networks, Critical dimension metrology, Finite-difference time-domain method, Cadmium, Simulations, Scatter measurement, Reflection

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Proceedings Article | 15 August 2023 Presentation + Paper

AI-guided numerical-aperture-controlled scatterometry for measurement of deep HAR and thin-film structures with a large depth variation

Zih-Ying Fu, Fu-Sheng Yang, Min-Ru Wu, Yen-Hung Hung, Liang-Chia Chen

Proceedings Volume 12618, 1261805 (2023) https://doi.org/10.1117/12.2673608

KEYWORDS: Reflectivity, Thin films, Scatterometry, Film thickness, Polarization, Artificial neural networks, Spectroscopy

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Proceedings Article | 10 August 2023 Presentation + Paper

Non-integral model-based scatterometry for single-structure OCD metrology

Wei-Hsin Chein, Fu-Sheng Yang, Zi-Ying Fu, Liang-Chia Chen

Proceedings Volume 12619, 126190H (2023) https://doi.org/10.1117/12.2673318

KEYWORDS: Model-based design, Scatterometry, Metrology, Critical dimension metrology, Beam shaping, Diffraction

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Proceedings Article | 27 April 2023 Presentation + Paper

AI-guided optical-model-based superresolution for semiconductor CD metrology

Wei-Yun Lee, Liang-Chia Chen

Proceedings Volume 12496, 124961G (2023) https://doi.org/10.1117/12.2658216

KEYWORDS: Point spread functions, Deconvolution, Databases, Imaging systems, Image deconvolution, Super resolution, Image processing, Diffraction limit, Convolution, Education and training

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Proceedings Article | 27 April 2023 Presentation + Paper

AI-guided OCD metrology for single HAR sub-micron via measurement

Fu-Sheng Yang, Zih-Ying Fu, Liang-Chia Chen

Proceedings Volume 12496, 124961A (2023) https://doi.org/10.1117/12.2658279

KEYWORDS: Finite-difference time-domain method, Education and training, Metrology, Scanning electron microscopy, Packaging, Manufacturing, Computer simulations, Tolerancing, Semiconductors, Scatterometry

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Proceedings Article | 27 April 2023 Presentation + Paper

Artificial-neural-network-assisted DUV scatterometry for OCD on HAR sub-micron structures

Zih-Ying Fu, Wei-Hsin Chein, Fu-Sheng Yang, Liang-Chia Chen

Proceedings Volume 12496, 124960E (2023) https://doi.org/10.1117/12.2657642

KEYWORDS: Artificial neural networks, Scatterometry, Deep ultraviolet, Data modeling, Scanning electron microscopy, Particle swarm optimization, Systems modeling, Reflection, Finite-difference time-domain method, Statistical modeling

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Proceedings Article | 20 May 2022 Presentation + Paper

Accuracy-enhanced diffraction image profilometry using foreign aberration for resolving image ambiguity

Guo-Wei Wu, Liang-Chia Chen

Proceedings Volume 12137, 121370M (2022) https://doi.org/10.1117/12.2621901

KEYWORDS: Error analysis, Diffraction, Calibration, Microscopy, Artificial neural networks

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Proceedings Article | 3 September 2019 Presentation + Paper

Precise microscopic profilometry using diffractive image correlation and theoretical model simulation

Guo-Wei Wu, Ming-Jun Jiang, Liang-Chia Chen

Proceedings Volume 11102, 111020A (2019) https://doi.org/10.1117/12.2528597

KEYWORDS: Diffraction, Image sensors, Databases, Digital micromirror devices, Confocal microscopy, Light sources, Monochromatic aberrations, 3D image reconstruction, Data hiding, 3D image processing

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Proceedings Article | 3 September 2019 Paper

Investigation and mapping strategy on influence of surface tilting in diffractive pattern correlation profilometry

Guo-Wei Wu, Ming-Jun Jiang, Liang-Chia Chen

Proceedings Volume 11102, 111021K (2019) https://doi.org/10.1117/12.2528982

KEYWORDS: Diffraction, Digital image correlation, Databases, Image processing, Algorithm development, Image sensors, Mirrors, Associative arrays, Objectives, Image analysis

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Proceedings Article | 21 June 2019 Presentation + Paper

Novel chromatic confocal differential interference contrast prototype

Johannes Belkner, Hsiu-Wen Liu, Eberhard Manske, Liang-Chia Chen

Proceedings Volume 11056, 1105611 (2019) https://doi.org/10.1117/12.2527854

KEYWORDS: Confocal microscopy, Calibration, Spectroscopy, Objectives, Manufacturing, 3D profilers, Chromatic aberrations, Birefringence

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Proceedings Article | 17 July 2015 Open Access

Optical super-resolution methodology for 3D full field surface profilometry to reconstruction of micro gratings (Withdrawal Notice)

Liang-Chia Chen, Hai Hong Hoang, Shyh-Tsong Lin, Kuang-Chao Fan, Rodion Kulikov

Proceedings Volume 9524, 952421 (2015) https://doi.org/10.1117/12.2189618

KEYWORDS: Super resolution, Photonic integrated circuits, Optical engineering, Current controlled current source

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Proceedings Article | 31 January 2013 Paper

Spectrally resolved chromatic confocal interferometry for one-shot nano-scale surface profilometry with several tens of micrometric depth range

Liang-Chia Chen, Yi-Shiuan Chen, Yi-Wei Chang, Shyh-Tsong Lin, Sheng Lih Yeh

Proceedings Volume 8759, 87592C (2013) https://doi.org/10.1117/12.2015027

KEYWORDS: Colorimetry, Confocal microscopy, Interferometry, Optical interferometry, Spectroscopy, Dispersion, Objectives, Calibration, 3D metrology, Interferometers

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Proceedings Article | 31 January 2013 Paper

Chromatic confocal surface profilometry employing signal recovering methodology for simultaneously resolving lateral and axial cross talk problems

Liang-Chia Chen, Tsung-Yi Lin, Yi-Wei Chang, Shyh-Tsong Lin

Proceedings Volume 8759, 87594I (2013) https://doi.org/10.1117/12.2015102

KEYWORDS: Confocal microscopy, Point spread functions, Colorimetry, Deconvolution, Calibration, Signal processing, Near field optics, Sensors, Convolution, Spectroscopy

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SPIE Journal Paper | 15 May 2012

Full-field chromatic confocal surface profilometry employing digital micromirror device correspondence for minimizing lateral cross talks

Liang-Chia Chen, Yi-Wei Chang, Hau-Wei Li

OE, Vol. 51, Issue 8, 081507, (May 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.8.081507

KEYWORDS: Colorimetry, Digital micromirror devices, Confocal microscopy, Sensors, Micromirrors, Calibration, Lithium, Digital imaging, Roentgenium, 3D metrology

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Proceedings Article | 16 November 2011 Paper

An embedded image processing and feedback compensation for the vibration-resistance system using white light interferometer

Stephen P. Tseng, Liang-Chia Chen, Calvin Ho, Chih-Yang Sheng

Proceedings Volume 8321, 83212H (2011) https://doi.org/10.1117/12.905061

KEYWORDS: Interferometers, Image processing, Ferroelectric materials, Embedded systems, Charge-coupled devices, Phase shifts, Cameras, Control systems, Interfaces, Data communications

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Proceedings Article | 16 November 2011 Paper

Full-field chromatic confocal surface profilometry employing DMD correspondence for minimizing lateral cross talks

Liang-Chia Chen, Hau-Wei Li, Yi-Wei Chang

Proceedings Volume 8321, 832120 (2011) https://doi.org/10.1117/12.904881

KEYWORDS: Colorimetry, Confocal microscopy, Digital micromirror devices, Sensors, Calibration, Micromirrors, Mirrors, Roentgenium, 3D acquisition, Charge-coupled devices

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Proceedings Article | 12 October 2006 Paper

Dynamic out-of-plane profilometry for nanoscale full field characterization of MEMS with automatic detection of vibratory modes and MHz-scale measurement bandwidth

Liang-Chia Chen, Huang-Wen Lai, Calvin Chang, Yao-Ting Huang, Jin-Liang Chen

Proceedings Volume 6382, 63820N (2006) https://doi.org/10.1117/12.685976

KEYWORDS: Interferometry, Light emitting diodes, Microelectromechanical systems, Atomic force microscopy, Image deconvolution, Ferroelectric materials, Signal detection, Deconvolution, Charge-coupled devices, Algorithm development

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Proceedings Article | 31 August 2005 Paper

3D surface profilometry for both static and dynamic nanoscale full field characterization of AFM micro cantilever beams

Liang-Chia Chen, Kuang-Chao Fan, Chi-Duen Lin, Calvin Chang, Ching-Fen Kao, Jung-Tsung Chou

Proceedings Volume 5878, 587804 (2005) https://doi.org/10.1117/12.614683

KEYWORDS: Interferometry, Microelectromechanical systems, Light emitting diodes, 3D metrology, Atomic force microscopy, Light sources, Ferroelectric materials, Control systems, Light, Silicon

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Proceedings Article | 10 December 1997 Paper

Reverse engineering physical models employing a sensor integration between 3D stereo detection and contact digitization

Liang-Chia Chen, Grier Lin

Proceedings Volume 3204, (1997) https://doi.org/10.1117/12.294453

KEYWORDS: 3D modeling, Reverse engineering, Reverse modeling, Sensors, CCD cameras, Visual process modeling, Process modeling, 3D metrology, Optical filters, Digital filtering

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Showing 5 of 21 publications

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