Dr. Li Wang Profile

Dr. Li Wang

at Xi'an Jiaotong Univ

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Author

Publications (2)

SPIE Journal Paper | 1 November 2008

Alignment measurement method for imprint lithography using moiré fringe pattern

Jinyou Shao, Hongzhong Liu, Yucheng Ding, Li Wang, Bingheng Lu

OE, Vol. 47, Issue 11, 113604, (November 2008) https://doi.org/10.1117/12.10.1117/1.3028350

KEYWORDS: Optical alignment, Fringe analysis, Semiconducting wafers, Lithography, Image processing, Error analysis, Fourier transforms, CCD cameras, Optical engineering, Spatial frequencies

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Proceedings Article | 9 June 2006 Paper

Novel nano-scale overlay alignment method for room-temperature imprint lithography

Li Wang, Yucheng Ding, Bingheng Lu, Zhihui Qiu

Proceedings Volume 6149, 61491V (2006) https://doi.org/10.1117/12.674257

KEYWORDS: Optical alignment, Signal detection, Lithography, Semiconducting wafers, Signal generators, Detector arrays, Submicron lithography, Optical filters, Moire patterns, Error analysis

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