Ms. Lay Cheng Choo Profile

Lay Cheng Choo

at DenseLight Semiconductors Pte Ltd

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 14 September 2001 Paper

Application of attenuated phase-shifting masks to sub-130-nm lithography

Chee Koo, Lay Choo, Qunying Lin, Shyue Tan, Hui Lee, Siu Chung Tam, Alex See

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435778

KEYWORDS: Optical proximity correction, Photomasks, Lithography, Critical dimension metrology, 193nm lithography, Phase shifts, Electroluminescence, Optical lithography, Lithographic illumination, Scanning electron microscopy

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Proceedings Article | 5 July 2000 Paper

Integration of attenuated phase-shift mask to 0.13-um technology contact level masking process

Lay Choo, O'Seo Park, Michael Sack, Siu Chung Tam

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388956

KEYWORDS: Photomasks, Phase shifts, Nanoimprint lithography, Scanners, Image transmission, Photomicroscopy, Photoresist materials, Scanning electron microscopy, Optical proximity correction, Photoresist processing

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Proceedings Article | 29 June 1998 Paper

Optimization of DUV photolithography for sub-250-nm technology: contact patterning with attenuated phase-shift mask

Lay Choo, Siu Chung Tam, Alex Cheng, Ida Ho

Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310785

KEYWORDS: Photomasks, Optical lithography, Lithography, Phase shifts, Deep ultraviolet, Lithographic illumination, Image transmission, Image processing, Laser optics, Microelectronics

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Proceedings Article | 13 August 1997 Paper

Design considerations of IRST system

Ronda Venkateswarlu, Meng Er, Siu Chung Tam, Choong Chan, Lay Choo

Proceedings Volume 3061, (1997) https://doi.org/10.1117/12.280379

KEYWORDS: Infrared search and track, Sensors, Target detection, Signal processing, Image processing, Staring arrays, Optical design, Infrared sensors, Electronics, Mirrors

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