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Laura Parellada-Monreal
at Ceit-IK4
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Publications (1)
Proceedings Article | 30 May 2017 Paper
Temperature simulation at ZnO surface processed by laser interference lithography
L. Parellada-Monreal, M. Martinez-Calderón, I. Castro-Hurtado, A. Rodríguez, S. Olaizola, M. Gomez-Aranzadi, I. Ayerdi, E. Castaño, G. Mandayo
Proceedings Volume 10246, 102461G (2017) https://doi.org/10.1117/12.2266260
KEYWORDS: Thermal effects, Sputter deposition, Optical lithography, Thermodynamics, Thermal modeling, Zinc oxide, Lithography, Thin films, Laser processing, N-type semiconductors, Electronics, Optoelectronics
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