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Dr. Lan Wang
at Nanyang Technological Univ
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Author
Publications (1)
Proceedings Article | 14 May 2004 Paper
A novel wafer baking system using hot air streams
Lan Wang, Siew Loong Chow, Ai Poh Loh, Zhi Ming Gong, Woei Wan Tan, Arthur Tay, Weng Khuen Ho
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534753
KEYWORDS: Semiconducting wafers, Prototyping, Temperature metrology, Lithography, Critical dimension metrology, Computer simulations, Process modeling, Solids, Manufacturing, 3D modeling
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