Dr. Koichi Kusuyama Profile

Dr. Koichi Kusuyama

at RIKEN

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Author

Publications (2)

Proceedings Article | 4 October 2024 Presentation + Paper

Fabrication of superconducting quantum circuits on 12-inch wafers using an ArF immersion lithography system Ⅱ

Satoru Odate, Naooki Saito, Hajime Aoyama, Koichi Kusuyama, Yasunobu Nakamura, Hiroyuki Tsukamoto

Proceedings Volume 13115, 1311508 (2024) https://doi.org/10.1117/12.3027297

KEYWORDS: Semiconducting wafers, Fabrication, Immersion lithography, Superconductors, Aluminum, Sputter deposition, Quantum circuits, Optical alignment, Quantum systems, Silicon

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Proceedings Article | 5 October 2023 Presentation + Paper

Fabrication of superconducting quantum circuits on 12-inch wafers using an ArF immersion lithography system

Satoru Odate, Naooki Saito, Kosuke Suzuki, Hajime Aoyama, Koichi Kusuyama, Yasunobu Nakamura, Hiroyuki Tsukamoto

Proceedings Volume 12652, 1265205 (2023) https://doi.org/10.1117/12.2675964

KEYWORDS: Immersion lithography, Superconductors, Fabrication, Semiconducting wafers, Quantum circuits, Quantum communications, Resonators, Quantum systems, Quantum numbers, Quantum computers

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