Dr. Kenji Iso
at Mitsubishi Chemical Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 February 2020 Paper
Yutaka Mikawa, Takayuki Ishinabe, Yuji Kagamitani, Tae Mochizuki, Hirotaka Ikeda, Kenji Iso, Tatsuya Takahashi, Kohei Kubota, Yuuki Enatsu, Yusuke Tsukada, Satoru Izumisawa
Proceedings Volume 11280, 1128002 (2020) https://doi.org/10.1117/12.2540737
KEYWORDS: Gallium nitride, Crystals, Etching, Transmission electron microscopy, Semiconducting wafers, Polishing, X-rays, Electronic components

Proceedings Article | 16 February 2020 Presentation + Paper
Kenji Iso, Shoma Ohtaki, Erina Miyata, Yuka Kido, Hisashi Murakami, Akinori Koukitu
Proceedings Volume 11280, 1128009 (2020) https://doi.org/10.1117/12.2543661
KEYWORDS: Gallium nitride, Crystals, Vapor phase epitaxy, Luminescence, Scanning electron microscopy, Silicon, Oxygen, Gallium, Interfaces, Semiconducting wafers

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