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Katharina Schmoelzer
at Infineon Technologies Austria Ag
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Publications (1)
Proceedings Article | 1 May 2023 Poster + Paper
Profile control in conductor metal wet etch with advanced photoresists
Ashley Moore, Julia Modl, Zhong Li, Hung-Yang Chen, Chunwei Chen, Andreas Behrendt, Katharina Schmoelzer
Proceedings Volume 12498, 124981J (2023) https://doi.org/10.1117/12.2657687
KEYWORDS: Photoresist materials, Etching, Adhesion, Wet etching, Copper, Metals, Semiconducting wafers, Coating, Lithography, Photoresist developing
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