Mr. Karl McNulty Profile

Karl McNulty

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Publications (2)

Proceedings Article | 5 March 2022 Presentation + Paper

Wafer scale fabrication of silicon nitride MEMS phase shifters with XeF2 dry vapor release etch process

Karl McNulty, Matthew van Niekerk, Venkatesh Deenadayalan, Carlos Errando-Herranz, Marcel Pruessner, Michael Fanto, Stefan Preble

Proceedings Volume 12006, 120060C (2022) https://doi.org/10.1117/12.2606849

KEYWORDS: Phase shifts, Waveguides, Microelectromechanical systems, Etching, Silicon, Semiconducting wafers, Vapor etching, Electrodes, Analytical research, Resonators

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Proceedings Article | 2 July 2019 Open Access

A modular laboratory curriculum for teaching integrated photonics to students with diverse backgrounds

Samuel Serna, Nancy Hidalgo, Janice Tjan, Kevin McComber, Lionel Kimerling, Erik Verlage, Julie Diop, Juejun Hu, Sajan Saini, Anu Agarwal, Gerald Gagnon, Stefan Preble, Gregory Howland, Matthew van Niekerk, Jeff Steidle, Karl Mcnulty, Jaime Cardenas, Meiting Song, Miloš Popović, Anatoly Khilo, Pradnya Nagarkar, Farhad Vazehgoo, Ira Moskowitz, Guiru Gu, Cheryl Schnitzer, Edward Deveney, Thomas Kling, Douglas Petkie, Jacob Longacre

Proceedings Volume 11143, 111431C (2019) https://doi.org/10.1117/12.2523867

KEYWORDS: Waveguides, Photonics, Photonic integrated circuits, Integrated photonics, Resonators, Wave propagation, Infrared cameras, Cameras, Engineering education, Silicon

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