In this paper, we present experimental data on hydrogen diffusion in single crystal and polycrystalline -Ga2O3 obtained from hydrogen diffusion and effusion experiments. The effective diffusion coefficients for H and D diffusion were obtained from diffusion experiments and amount to D 210-13 cm2/s at a temperature of 425 °C. Similar values were obtained from H effusion experiments. To obtain the energetic barrier for hydrogen migration in -Ga2O3 the heating rate of the effusion experiment was varied. The temperature at which the molecular H flux shows its maximum value increases with increasing heating rate. According to Beyer and Wagner [3] this method is suitable to determine the temperature dependence of the diffusion coefficient. The hydrogen effusion data were further analyzed in terms of a hydrogen density-of-states. State-of-the-art single crystal -Ga2O3 exhibits a well-defined peak at E – Etr ~ 1.5 eV.
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