Mr. Junqi Liu Profile

Junqi Liu

at Shanghai Univ

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Proceedings Article | 18 December 2012 Paper

Simulation of cylindrical interferometric testing with position error of bearing

Junqi Liu, Junzheng Peng, Dongbao Ge, Yingjie Yu

Proceedings Volume 8550, 85501O (2012) https://doi.org/10.1117/12.978985

KEYWORDS: Interferometry, Zemax, Optical testing, Interferometers, Systems modeling, Charge-coupled devices, Nondestructive evaluation, Environmental sensing, Mirrors, Error analysis

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The surface microstructure of engine cylinder is critical to its performance. To reduce wear and generated noise, a submicron and even nanometer smooth surface is required, so more requirements are needed for traditional measurement. While interferometric optical profilers are often used for testing surface microstructure and this technique is both noncontact and nondestructive, we set up a cylindrical interferometric measurement system to get the surface shape of engine cylinder wall. This system includes the interferometer, the cylindrical wave converter and a platform with five-dimensional precise adjustment. Considering the aberration affected by the real experiment condition, it is almost impossible to measure the surface profile of the tested object with displacement from a best-fit reference cylinder. In this paper, we set up a model to simulate the interferogram when the axis of measured object is off the cylindrical focus line. As the actual experiment environment, there are four situations about the position error of measured object and the exit pupil wave surface formula for each case can be built by the physical optics. If tested object center is slightly displaced from the focal line, the formula of the wave surface can be simplified. Then we can get the interferogram by using the formula. The paper also compares the simulation results with the ones by Zemax software to verify the testing mode.

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