Ms. Jenny Perry Profile

Jenny Perry

at Applied Materials Israel Ltd

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Publications (2)

Proceedings Article | 16 April 2024 Presentation + Paper

SEM overlay target design optimization by e-beam simulation

Il Hwan Kim, Cheolgyu Hyun, Sangho Jo, Muyoung Lee, Ikjun Jang, Jongsu Kim, Jinhong Park, Yigwon Kim, Chang Min Park, Kevin Houchens, Jenny Perry, Nahum Bomshtein, Liad Anokov, Noam Oved, Uri Smolyan, Michael Shifrin, Tal Itzkovich, Jeong Ho Yeo, You Jin Kim, Baek Jun Kim

Proceedings Volume 12955, 129551I (2024) https://doi.org/10.1117/12.3010511

KEYWORDS: Design, Scanning electron microscopy, Overlay metrology, Monte Carlo methods, Electrons, Lithography, Precision measurement, Electron beam lithography, Design rules, Signal detection

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Proceedings Article | 30 April 2023 Poster

SEM overlay target design using e-beam simulation

Kevin Houchens, Yaniv Abramovitz, Shay Attal, Ofer Adan, Nahum Bomshtein, Itai Buks, Ryan Hsieh, Tal Itzkovich, Jenny Perry

Proceedings Volume 12496, 1249623 (2023) https://doi.org/10.1117/12.2669984

KEYWORDS: Overlay metrology, Scanning electron microscopy, Design and modelling, Metrology, Semiconducting wafers, Visibility, Shrinkage, Optical metrology, Design rules, Calibration

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