Mr. Jeffrey W. Roberts Profile

Jeffrey W. Roberts

at N & K Technology

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Publications (3)

Proceedings Article | 1 April 2013 Paper

Effect of cleaning on EUV masks

Jeffrey Roberts

Proceedings Volume 8679, 867937 (2013) https://doi.org/10.1117/12.2022472

KEYWORDS: Oxides, Ruthenium, Reflectivity, Photomasks, Extreme ultraviolet, Tantalum, Amorphous silicon, Molybdenum, Transmittance, Chromium

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Proceedings Article | 11 December 2009 Paper

Ultra-sensitive optical metrology for hard disk DTR and BPM imprints

Jeffrey Roberts, Linlin Hu, Iris Bloomer, Shih-Fu Lee, Yongdong Liu

Proceedings Volume 7520, 75200I (2009) https://doi.org/10.1117/12.837146

KEYWORDS: Beam propagation method, Critical dimension metrology, Reflectivity, Transmittance, Atomic force microscopy, Gemini Observatory, Silica, Metrology, Etching, Optical metrology

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Proceedings Article | 30 September 2009 Paper

A non-destructive metrology solution for detailed measurements of imprint templates and media

Jeffrey Roberts, Linlin Hu, Torbjörn Eriksson, Kristian Thulin, Babak Heidari

Proceedings Volume 7488, 74881Z (2009) https://doi.org/10.1117/12.833465

KEYWORDS: Reflectivity, Transmittance, Beam propagation method, Gemini Observatory, Scanning electron microscopy, Magnetism, Nondestructive evaluation, Lithography, Data modeling, Metrology

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