Dr. Janak Singh Profile

Dr. Janak Singh

MEMS Senior Research Engineer at Institute of Microelectronics

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Author

Publications (7)

Proceedings Article | 28 February 2008 Paper

Novel 3D micromirror for miniature optical bio-probe SiOB assembly

Janak Singh, Yingshun Xu, C. Premachandran, Teo Hui Siang Jason, Nanguang Chen

Proceedings Volume 6886, 688608 (2008) https://doi.org/10.1117/12.762544

KEYWORDS: Micromirrors, Mirrors, Silicon, Tissue optics, Optical coherence tomography, Etching, Actuators, Light scattering, Microelectromechanical systems, Deep reactive ion etching

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Proceedings Article | 8 February 2008 Paper

A biocompatible miniaturized package housing for a 3D micromirror-based optical bioprobe for OCT imaging application

C. S. Premachandran, Ahmad Khairyanto, Kelvin Chen, Janak Singh

Proceedings Volume 6887, 688708 (2008) https://doi.org/10.1117/12.762949

KEYWORDS: Mirrors, Optical coherence tomography, Micromirrors, Tissue optics, Silicon, 3D image processing, Optical fabrication, Image processing, Tissues, Lens design

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Proceedings Article | 11 July 2007 Paper

MEMS-based non-rotatory circumferential scanning optical probe for endoscopic optical coherence tomography

Yingshun Xu, Janak Singh, Teo Hui Siang, Kotlanka Ramakrishna, C. S. Premchandran, Chen Wei Sheng, Chuah Tong Kuan, Nanguang Chen, Malini Olivo, Colin Sheppard

Proceedings Volume 6627, 662715 (2007) https://doi.org/10.1117/12.726736

KEYWORDS: Micromirrors, Actuators, Mirrors, Silicon, Optical coherence tomography, Endoscopy, Microelectromechanical systems, GRIN lenses, 3D scanning, Aluminum

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Proceedings Article | 13 February 2007 Paper

Optical coherent tomography (OCT) bio-imaging using 3D scanning micromirror

J. Singh, Chan Hoe, Teo Jason, C. Nanguang, C. Premachandran, Collin Sheppard, M. Olivo

Proceedings Volume 6432, 64320C (2007) https://doi.org/10.1117/12.702279

KEYWORDS: Micromirrors, Optical coherence tomography, 3D scanning, Mirrors, Tissues, Tissue optics, GRIN lenses, Integrated optics, Actuators, 3D image processing

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Proceedings Article | 16 April 1998 Paper

Optimization of stress in LPCVD polysilicon films for MEMS applications

Janak Singh, Ami Chand, Sudhir Chandra

Proceedings Volume 3321, (1998) https://doi.org/10.1117/12.305590

KEYWORDS: Low pressure chemical vapor deposition, Annealing, Microelectromechanical systems

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Proceedings Article | 16 April 1998 Paper

Capacitance voltage characteristics of the electrochemical cell for bulk silicon micromachining

Ami Chand, Janak Singh, Sudhir Chandra

Proceedings Volume 3321, (1998) https://doi.org/10.1117/12.305555

KEYWORDS: Capacitance, Silicon, Etching, Oxides, Electrodes, Electrochemical etching, Interfaces, Capacitors, Molybdenum, Anisotropic etching

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Proceedings Article | 2 September 1997 Paper

Design and development of microstructures for MEMS applications

Sudhir Chandra, Janak Singh, Ami Chand

Proceedings Volume 3226, (1997) https://doi.org/10.1117/12.284571

KEYWORDS: Microelectromechanical systems, Annealing, Silicon, Wafer bonding, Micromachining, Boron, Dielectrics, Low pressure chemical vapor deposition, Surface micromachining

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Showing 5 of 7 publications

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