Mr. Jaime Cardona Profile

Jaime Cardona

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 27 May 2022 Poster + Paper

Ge-Si-Sn-O alloys for uncooled infrared detections

Jaime Cardona, Femina Vadekapurethu, Mukti Rana

Proceedings Volume 12107, 1210723 (2022) https://doi.org/10.1117/12.2631569

KEYWORDS: Thin films, Tin, Absorption, Transmittance, Sputter deposition, Reflectivity, Microbolometers, Thin film deposition, Resistance, Thermography

Read Abstract +

We report the investigations of Ge-Si-Sn-O alloys for using them as the sensing layer of microbolometers. The investigated properties include atomic composition, resistivity, temperature coefficient of resistance (TCR), activation energy, transmittance, absorptance and reflectance, optical bandgap and thermal conductivity. We have prepared thin films of GeSi-Sn-O alloys using a combination of direct current (DC) and radio frequency (RF) magnetron sputtering. We bonded pieces of Si substrate on a Ge target by silver paste to obtain a compound Si-Ge target. Si-Ge and Sn were sputtered simultaneously in a Kurt J. Leskar Pro Line PVD-75 sputtering system in Ar+O₂ environment to prepare Ge-Si-Sn-O films. The sputtering power and process gases’ concentrations were varied to obtain appropriate film compositions. Samples were fabricated in a single batch for different tests so that uniform composition and film properties were ensured throughout the samples being analyzed. A room temperature TCR of -3.66%/K and resistivity of 1.885×10⁵ Ω-cm was obtained from the thin film with an atomic composition of Ge₃₉Si₀₅Sn₁₄O₃₆. We also obtained the thermal conductivity of 0.403 Wm^-1 K^-1 for 1339 nm-thick Ge₃₉Si₀₅Sn₁₄O₃₆ film. During our investigation, we found that as the Sn concentration in Ge-Si-Sn-O increased, the absorption also increased. This increased absorption led to decrease the optical bandgap of Ge-Si-Sn-O. Higher Sn concentrations in Ge-Si-Sn-O tend to decrease the resistivity as well TCR. Higher O₂ concentration in Ge-Si-Sn-O, increased the optical bandgap, resistivity and TCR. We also obtained the thermal conductivity of 0.403 Wm^-1 K^-1 for 1339 nm-thick Ge₃₉Si₀₅Sn₁₄O₃₆ film at 300K.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years