The production of clean energy is nowadays a very important and critical topic and Laser Fusion is one of the possibilities to achieve this goal. In order to improve the efficiency of this technology, one of the problematics is the increase in laser energy in the optical systems, and therefore the need for optical coatings able to sustain higher fluence. In this study, the contribution of the substrate surface quality on the optical performance and Laser Induced Damage Threshold (LIDT) will be investigated. Mirror coatings for a wavelength of 532nm will be coated using an Ion Beam Sputtering System on different types of glass substrates and the optical properties like scattering, absorption and Laser Damage will be presented and discussed.
Ion Beam Sputtering systems are well established as state-of-the-art deposition tools for the coating of high quality optical thin films with high density and low losses. These coatings are used for many laser applications, with an ever-increasing demand for higher sustained fluence. Ion Beam Sputtering (IBS) is a known technique to provide such high optical quality thin films. Indeed, it allows to achieve high density layers with low absorption and scattering. In this work, various coatings were developed using Bühler IBS technology. Then, total losses were measured using Cavity Ring Down, absorption using Laser Induced Deflection or Laser thermography, and Total Integrated Scatter using dedicated scatterometers. A correlation between the effect of the chosen deposition method and parameters and the measurement performances were made with the aim of a better understanding of the level and the origin of losses in the coatings. Finally, highly reflecting mirror coatings for 1064 nm wavelength were fabricated with different designs and deposition parameters. The results of the different measurements of absorption, scattering and total losses using different equipment are presented and discussed.
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