Dr. Igor Lyuboshenko Profile

Dr. Igor Lyuboshenko

Chief Executive Officer at PhaseView

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Proceedings Article | 6 January 2006 Paper

A new technique for 3D profilometry of MEMS

Igor Lyuboshenko, Alain Bosseboeuf

Proceedings Volume 6111, 61110V (2006) https://doi.org/10.1117/12.648890

KEYWORDS: Interferometry, Microelectromechanical systems, 3D metrology, Phase interferometry, Image processing, 3D image reconstruction, Microscopes, Phase shifting, Microscopy, Spatial resolution

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Based on physical optics models of light propagation, scattering and transfer, a new fast computerized non-interferometric technique for 3D image reconstruction using wide-field microscopy is developed and tested that allows profilometry of M(O)EMS without compromising accuracy and spatial resolution attained by well established interferometry techniques. This non-destructive technique associated with using conventional microscope setups allows obtaining high-quality 3D profiles of structures like protecting membranes for packaging of MEMS with subsequent measurements of their mechanical properties. The comparison with conventional phase-shift interferometry-based measurements yielded encouraging results. The technique finds its potential whenever using of laser scanning confocal microscopy or phase-shifting techniques is compromised by the need to perform vibration-insensitive studies, or whenever stringent acquisition time requirements are of concern. This software technique being fully automatic, no changes to the existing hardware in the optical paths of microscopes is required. Moreover, the image acquisition protocol associated with the technique allows for simpler and cheaper measuring devices than interferometers and open the possibility for creating portable devices. The technique is tested on images acquired to control of packaging of MEMS by measuring deformations in MEMS protection membranes. The method's simplicity, its lower implementation cost and better insensitivity to vibrations with respect to established interferometric techniques makes it a potentially promising procedure for routine MEMS quality control in industrial environments.

Proceedings Article | 22 December 1997 Paper

Robust algorithms for phase unwrapping in SAR interferometry

Igor Lyuboshenko, Henri Maitre

Proceedings Volume 3217, (1997) https://doi.org/10.1117/12.295599

KEYWORDS: Algorithm development, Interferometry, Synthetic aperture radar, Phase interferometry, Fourier transforms, Data acquisition, Satellites

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The paper addresses the problem of the development of robust algorithms for unwrapping the interferometric phase (IF) produced in the SAR interferometry. Two practicable methods are proposed based on the Green's first identify with properly chosen Green's functions satisfying the imposed Newmann's boundary conditions. These Green's functions are being found when solving the NEwmann's problem by means of the potential theory or through the representation of the Green's function as an infinite 2D series in the eigenfunctions of the Helmholtz equation. Then, the algorithms are being further elaborated using the method of regularization while searching for a gradient of the measured IF. Thus, the proposed approaches take into account the presence of the measurement noise in the IF. The developed algorithms proved to be stable both with respect to propagation of errors and with respect to local perturbations in the unwrapped phase due to inaccuracy of the measurement of a wrapped IF. The proposed algorithms allow their efficient numerical implementation using the fast Fourier transform. Experiments on data acquired by the satellite ERS-1 and supplied by CNES show high performance of both developed methods.

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