Hyunkyu Kim
at Nova Ltd.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 129550G (2024) https://doi.org/10.1117/12.3012496
KEYWORDS: Raman spectroscopy, Transmission electron microscopy, Interferometry, Semiconducting wafers, Signal intensity, Machine learning, Film thickness, Diffractive optical elements, Chalcogenides, Calibration

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