Mr. HyeungCheol Mun Profile

HyeungCheol Mun

at SAMSUNG Electronics Co., Ltd.

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Publications (1)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper

Improved fab-out EDS prediction of memory device using effective accuracy equation

Heeyoon Han, Wansik Nam, Hyeungcheol Mun, Sangbong Lee, Sungyoon Ryu, Younghoon Sohn

Proceedings Volume 12053, 120531S (2022) https://doi.org/10.1117/12.2613619

KEYWORDS: Binary data, Metrology, Distortion, Semiconducting wafers, Semiconductors, Manufacturing, Data conversion, Data modeling, Yield improvement, Optics manufacturing

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