Prof. Hironari Yamada Profile

Prof. Hironari Yamada

Professor/Researcher/Inventor at Ritsumeikan Univ

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Author

Publications (4)

SPIE Journal Paper | 29 May 2012

Tabletop storage ring MIRRORCLE extreme ultraviolet lithography source

Hironari Yamada, Dorian Minkov, Taichi Hayashi, Daisuke Hasegawa

JM3, Vol. 11, Issue 02, 021121, (May 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.021121

KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Aluminum, Synchrotrons, Electron beams, X-rays, Magnetism, Chromium, Optical filters, Tin

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Proceedings Article | 23 September 2011 Paper

Conceptual design for a dispersive XAFS beamline in the compact storage ring MIRRORCLE

N. Canestrari, V. Roger, P. Jeantet, O. Leynaud, L. Ortega, H. Yamada, T. Hanashima, J. E. Lorenzo, M. Sanchez del Rio

Proceedings Volume 8141, 814116 (2011) https://doi.org/10.1117/12.895284

KEYWORDS: Crystals, Electrons, X-rays, Absorption, Optical components, Collimators, Laser crystals, Sensors, Cameras, Optical simulations

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SPIE Journal Paper | 1 October 2008

Source for extreme ultraviolet lithography by the tabletop storage ring MIRRORCLE

Hironari Yamada, Dorian Minkov, Norio Toyosugi, Masaki Morita, Daisuke Hasegawa, Ahsa Moon, Ejike Okoye

JM3, Vol. 7, Issue 04, 043004, (October 2008) https://doi.org/10.1117/12.10.1117/1.3040017

KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Microelectromechanical systems, Electron beams, Mirrors, Aluminum, Plasma, Auroras, Bismuth, Gold

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Proceedings Article | 22 September 2008 Paper

MIRRORCLE light source demonstrating one micron resolution and clear density mapping

H. Yamada, T. Hiraia, M. Morita, D. Hasegawa, M. Hanashima

Proceedings Volume 7078, 70780P (2008) https://doi.org/10.1117/12.796333

KEYWORDS: X-rays, Laser sintering, Synchrotrons, X-ray imaging, Light sources, Phase contrast, Image processing, Photons, Synchrotron x-ray imaging, Tomography

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