Mr. Hidekazu Takahashi Profile

Hidekazu Takahashi

at Institute of Science Tokyo

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Publications (1)

Proceedings Article | 23 March 2020 Paper

A feature selection method for weak classifier based hotspot detection

Hidekazu Takahashi, Hiroki Ogura, Shimpei Sato, Atsushi Takahashi, Chikaaki Kodama

Proceedings Volume 11328, 113281E (2020) https://doi.org/10.1117/12.2559358

KEYWORDS: Feature extraction, Feature selection, Lithography, Simulation of CCA and DLA aggregates, Machine learning, Manufacturing, Computer programming, Semiconducting wafers, Design for manufacturability, Very large scale integration

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