Ion-assist applications of broad-beam ion sources are reviewed for ion energies up to about 1 keV. These applications are organized by ion energy and cover a wide range of thin-film technologies. Optimum ion-assist doses are described when available. Except for applications that benefit from specific ion energies, the majority of ion-assist applications are probably done best in the low-energy range that extends from about 25 eV to 100 eV.
The development of ion sources for thin film coatings and modifications in the past decade are reviewed. Recent applications for optics and microelectronics are discussed.
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