Dr. Han Huang Profile

Dr. Han Huang

at Univ of Queensland

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Author

Publications (5)

Proceedings Article | 9 January 2008 Paper

Mechanical characteristics of filter structures for MEMS adaptive infrared detectors

H. Huang, S. Liu, J. Dell, L. Faraone

Proceedings Volume 6800, 68000R (2008) https://doi.org/10.1117/12.758816

KEYWORDS: Mirrors, Finite element methods, Microelectromechanical systems, Optical filters, Infrared detectors, Digital filtering, Tunable filters, Plasma enhanced chemical vapor deposition, Mechanical engineering, Structural design

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Proceedings Article | 21 December 2007 Paper

Surface topography in mechanical polishing of 6H-SiC (0001) substrate

Ling Yin, Han Huang

Proceedings Volume 6798, 67981I (2007) https://doi.org/10.1117/12.758612

KEYWORDS: Polishing, Silicon carbide, Surface finishing, Surface roughness, Crystals, Photomicroscopy, Diamond, Silicon, Interferometry, Error analysis

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Proceedings Article | 7 July 2005 Paper

MEMS based tunable infrared sensors

J. Antoszewski, K. Winchester, A. Keating, T. Nguyen, K. K. M. B. D. Silva, H. Huang, C. Musca, J. Dell, L. Faraone, P. Mitra, J. Beck, M. Skokan, J. Robinson

Proceedings Volume 5840, (2005) https://doi.org/10.1117/12.624884

KEYWORDS: Mirrors, Microelectromechanical systems, Mercury cadmium telluride, Sensors, Optical filters, Short wave infrared radiation, Silicon, Photodiodes, Infrared sensors, Infrared radiation

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Proceedings Article | 31 May 2005 Paper

A monolithically integrated HgCdTe SWIR photodetector and tunable MEMS-based optical filter

J. Antoszewski, K. Winchester, A. Keating, T. Nguyen, K. K. M. B. D. Silva, H. Huang, C. Musca, J. Dell, L. Faraone, P. Mitra, J. Beck, M. Skokan, J. Robinson

Proceedings Volume 5783, (2005) https://doi.org/10.1117/12.603519

KEYWORDS: Mirrors, Mercury cadmium telluride, Optical filters, Sensors, Microelectromechanical systems, Photoresistors, Short wave infrared radiation, Fabry–Perot interferometers, Infrared detectors, Silicon

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Proceedings Article | 19 May 2005 Paper

Determination of mechanical properties of silicon nitride thin films using nanoindentation

Mariusz Martyniuk, Jarek Antoszewski, Byron Walmsley, Charles Musca, John Dell, Yeon-Gil Jung, Brian Lawn, Han Huang, Lorenzo Faraone

Proceedings Volume 5798, (2005) https://doi.org/10.1117/12.604245

KEYWORDS: Thin films, Silicon, Microelectromechanical systems, Silicon films, Thin film deposition, Plasma enhanced chemical vapor deposition, Microsystems, Diamond, Control systems, Reliability

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