Gregg T. Borek
Vice President Microoptics at JENOPTIK Optical Systems LLC
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 15 April 2008 Paper
Proceedings Volume 6940, 69400W (2008) https://doi.org/10.1117/12.778748
KEYWORDS: Etching, Semiconducting wafers, Diffraction, Optical lithography, Plasma etching, Chalcogenide glass, Wafer-level optics, Infrared radiation, Optics manufacturing, Gallium arsenide

Proceedings Article | 6 February 2008 Paper
Proceedings Volume 6883, 68830O (2008) https://doi.org/10.1117/12.767531
KEYWORDS: Etching, Diffusers, Binary data, Microlens array, Semiconducting wafers, Calcium, Photoresist materials, Ions, Photomasks, Optics manufacturing

Proceedings Article | 7 March 2007 Paper
Proceedings Volume 6462, 64620X (2007) https://doi.org/10.1117/12.715022
KEYWORDS: Optics manufacturing, Optical components, Optical lithography, Near field optics, Micro optics, Manufacturing, Chemical elements, Lithography, Electron beam lithography, Photomasks

Proceedings Article | 18 May 2005 Paper
Proceedings Volume 5786, (2005) https://doi.org/10.1117/12.607454
KEYWORDS: Etching, Gallium arsenide, Semiconducting wafers, Photoresist materials, Atomic force microscopy, Reflectivity, Transmittance, Antireflective coatings, Thin film coatings, Photoresist developing

Proceedings Article | 22 January 2005 Paper
Gregg Borek, Jared Shafer, Lamarr Simmons
Proceedings Volume 5720, (2005) https://doi.org/10.1117/12.600789
KEYWORDS: Etching, Semiconducting wafers, Glasses, Silicon carbide, Gallium nitride, Plasma etching, Gallium arsenide, Photoresist materials, Photomasks, Plasma

Showing 5 of 10 publications
Conference Committee Involvement (7)
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
25 January 2010 | San Francisco, California, United States
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II
26 January 2009 | San Jose, California, United States
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
21 January 2008 | San Jose, California, United States
Micromachining Technology for Micro-optics and Nano-optics V
23 January 2007 | San Jose, California, United States
Micromachining Technology for Micro-Optics and Nano-Optics IV
23 January 2006 | San Jose, California, United States
Showing 5 of 7 Conference Committees
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