Dr. Gila E. Stein Profile

Dr. Gila E. Stein

Assistant Professor of Chemical & Biomolecular Eng at Univ of Houston

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Publications (4)

Proceedings Article | 19 March 2015 Paper

Tilting of lamellar domains on neutral random copolymer brushes

Indranil Mitra, Nikhila Mahadevapuram, Joseph Strzalka, Gila Stein

Proceedings Volume 9423, 942320 (2015) https://doi.org/10.1117/12.2085676

KEYWORDS: Polymethylmethacrylate, Interfaces, Scattering, Annealing, Thin films, Silicon, Lithography, Picosecond phenomena, Scanning electron microscopy, Microscopy

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SPIE Journal Paper | 16 December 2014 Open Access

Characterizing acid diffusion lengths in chemically amplified resists from measurements of deprotection kinetics

Abhijit Patil, Yogendra Narayan Pandey, Manolis Doxastakis, Gila Stein

JM3, Vol. 13, Issue 04, 043017, (December 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.4.043017

KEYWORDS: Diffusion, Polymers, Data modeling, Photoresist materials, Chemically amplified resists, Infrared spectroscopy, Nanostructures, Lithography, Absorbance, Spectroscopy

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Proceedings Article | 27 March 2014 Paper

Modeling acid transport in chemically amplified resist films

Abhijit Patil, Manolis Doxastakis, Gila Stein

Proceedings Volume 9051, 90511M (2014) https://doi.org/10.1117/12.2046473

KEYWORDS: Polymers, Diffusion, Data modeling, Infrared spectroscopy, Lithography, Chemically amplified resists, Absorbance, Infrared radiation, Spectroscopy, Stochastic processes

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SPIE Journal Paper | 12 August 2013

Three-dimensional x-ray metrology for block copolymer lithography line-space patterns

Daniel Sunday, Matthew Hammond, Chengqing Wang, Wen-li Wu, R. Joseph Kline, Gila Stein

JM3, Vol. 12, Issue 03, 031103, (August 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.3.031103

KEYWORDS: Scattering, X-rays, Picosecond phenomena, Lithography, Polymethylmethacrylate, Metrology, 3D metrology, X-ray lithography, Absorption, Directed self assembly

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