Dr. Gaspard Hiblot Profile

Dr. Gaspard Hiblot

at imec

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Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

2D local interconnect metal patterning exploration for CFET

Hsinlan Chang, Youssef Drissi, Gioele Mirabelli, Odysseas Zografos, Yasser Sherazi, Julien Ryckaert, Gaspard Hiblot

Proceedings Volume 12953, 129530Y (2024) https://doi.org/10.1117/12.3010804

KEYWORDS: Extreme ultraviolet, Printing, Optical lithography, Extreme ultraviolet lithography, Metals, Transistors, Optical proximity correction, Deep ultraviolet

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Proceedings Article | 28 April 2023 Presentation + Paper

Design-technology co-optimization overview of CFET architecture

G. Mirabelli, P. Schuddinck, H.-H. Liu, S. Yang, O. Zografos, S. Salahuddin, P. Weckx, G. Hiblot, G. Hellings, J. Ryckaert

Proceedings Volume 12495, 124950M (2023) https://doi.org/10.1117/12.2657726

KEYWORDS: Semiconducting wafers, Back end of line, Nanosheets, Logic, Standards development, Metals, Fin field effect transistors, Semiconductors, Optical lithography, Nanotechnology

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