Franziska Wall
at Fraunhofer-Institut für Photonische Mikrosysteme IPMS
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 2 March 2022 Presentation + Paper
Proceedings Volume 11955, 1195504 (2022) https://doi.org/10.1117/12.2616657
KEYWORDS: Finite element methods, 3D modeling, Microelectromechanical systems, Fluid dynamics, Electrodes, Acoustics, Transducers, Physics, Modeling, Microfluidics

Proceedings Article | 28 February 2020 Paper
Proceedings Volume 11293, 112930D (2020) https://doi.org/10.1117/12.2551271
KEYWORDS: Actuators, Finite element methods, Silicon, Microelectromechanical systems, Solids, Capacitors, Differential equations, Complex systems, Acoustics

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