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Dr. Eric T. Peeters
at PARC, part of SRI International
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 5 September 1997 Paper
Vibration signature analysis sensors for predictive diagnostics
Eric Peeters, Jingkuang Chen, Joel Kubby, Olivera Vitomirov
Proceedings Volume 3224, (1997) https://doi.org/10.1117/12.301968
KEYWORDS: Sensors, Diagnostics, Wheatstone bridges, Printing, Mechanical sensors, Silicon, Resonators, Bridges, Multiplexing, Transistors
Proceedings Article | 2 September 1997 Paper
Design, modeling and verification of MEMS silicon torsion mirror
F. Pan, Joel Kubby, Eric Peeters, Jingkuang Chen, Olivera Vitomirov, D. Taylor, Subrata Mukherjee
Proceedings Volume 3226, (1997) https://doi.org/10.1117/12.284559
KEYWORDS: Mirrors, Microelectromechanical systems, Silicon, Computer aided design, Semiconductor lasers, Nonimpact printing, Instrument modeling, Performance modeling, Raster graphics, Scanners
Proceedings Article | 17 September 1996 Paper
Silicon accelerometers: generic design and operating principles and a case study
Proceedings Volume 2882, (1996) https://doi.org/10.1117/12.250696
KEYWORDS: Silicon, Electromechanical design, Sensors
Proceedings Volume Editor (2)
SPIE Conference Volume | 15 August 2000
Micromachined Devices and Components VI
SPIE Conference Volume | 31 August 1999
Micromachined Devices and Components V
Conference Committee Involvement (4)
Micromachined Devices and Components VI
18 September 2000 | Santa Clara, CA, United States
Design, Test, Integration, and Packaging of MEMS/MOEMS
9 May 2000 | Paris, France
Micromachined Devices and Components
20 September 1999 | Santa Clara, CA, United States
Micromachining and Microfabrication
30 March 1999 | Paris, France
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