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Eric Eastman
at International Business Machines
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Publications (1)
Proceedings Article | 4 April 2017 Presentation + Paper
Identification and sensitivity analysis of a correlated ground rule system (design arc)
Eric Eastman, Dureseti Chidambarrao, Werner Rausch, Rasit Topaloglu, Dongbing Shao, Ravikumar Ramachandran, Matthew Angyal
Proceedings Volume 10148, 101480I (2017) https://doi.org/10.1117/12.2258002
KEYWORDS: Monte Carlo methods, Computer simulations, Tolerancing, 3D modeling, Lithography, Semiconductors, Logic, Performance modeling, Process engineering, Data modeling, Manufacturing, Design for manufacturability, Detection and tracking algorithms, Statistical modeling, Systems modeling
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