Dr. Emmanuel Nolot Profile

Dr. Emmanuel Nolot

at MINATEC

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Publications (3)

Proceedings Article | 16 February 2020 Presentation + Paper

Analysis of InGaN surfaces after chemical treatments and atomic layer deposition of Al2O3 for µLED applications

Corentin Le Maoult, David Vaufrey, François Martin, Eugénie Martinez, Emmanuel Nolot, Stéphane Cadot, Etienne Gheeraert

Proceedings Volume 11280, 112801C (2020) https://doi.org/10.1117/12.2544787

KEYWORDS: Aluminum, Atomic layer deposition, Sulfur, Indium gallium nitride, Indium, Light emitting diodes, Gallium, Chemical analysis, Oxygen, Quantitative analysis

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Proceedings Article | 11 October 2012 Paper

Performances and limitations of Lab-to-Fab strategies for inline optical metrology

E. Nolot, A. André, A. Michallet

Proceedings Volume 8466, 846605 (2012) https://doi.org/10.1117/12.928368

KEYWORDS: Silicon, Oxides, Semiconducting wafers, Metals, Germanium, Silica, X-rays, Metrology, Thin films, Reflectometry

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Proceedings Article | 1 September 2005 Paper

In-line characterization of silicon nano-crystals grown on high-K tunnel dielectrics

E. Nolot, P. Mur, S. Favier

Proceedings Volume 5878, 587805 (2005) https://doi.org/10.1117/12.616820

KEYWORDS: Silicon, Scanning electron microscopy, Semiconducting wafers, Aluminum, X-rays, Air contamination, Light scattering, Reflectivity, Hybrid fiber optics, Dielectrics

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