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Dr. Ducksun Yang
at Samsung Electronics Semiconductor
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Publications (1)
Proceedings Article | 24 March 2006 Paper
Statistical analysis of CD-SEM measurement and process control in the indistinguishable multiprocess patterns
Duck-Sun Yang, Myung-Ho Jung, Young-Mi Lee, Cha-Won Koh, Gi-Sung Yeo, Sang-Gyun Woo, Han-Ku Cho, Joo-Tae Moon
Proceedings Volume 6152, 61522K (2006) https://doi.org/10.1117/12.656058
KEYWORDS: Critical dimension metrology, Neodymium, Control systems, Process control, Scanning electron microscopy, Statistical analysis, Etching, Electronics, Cadmium, Inspection
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