Dr. Dirk Stenkamp Profile

Dr. Dirk Stenkamp

Managing Director/Board Member at Carl Zeiss SMT AG

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Publications (2)

Proceedings Article | 20 August 2001 Paper

Progress on the realization of the electron column modules for SCALPEL high-throughput/alpha electron projection lithography tools

Dirk Stenkamp, O. Kienzle, Alexander Orchowski, Wigbert Rau, A. Weickenmeier, G. Benner, M. Wetzke, Warren Waskiewicz, Victor Katsap, Xieqing Zhu, Haoning Liu, Eric Munro, John Rouse

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436642

KEYWORDS: Charged-particle lithography, Photomasks, Optics manufacturing, Projection systems, Optical alignment, Metrology, Semiconducting wafers, Electron beam lithography, Projection lithography, Lithography

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Proceedings Article | 26 April 2001 Paper

Electron projection lithography: progress on the electron column modules for SCALPEL high-throughput/alpha exposure tools

Dirk Stenkamp, Claudia Hertfelder, O. Kienzle, Alexander Orchowski, Wigbert Rau, A. Weickenmeier, Warren Waskiewicz

Proceedings Volume 4404, (2001) https://doi.org/10.1117/12.425222

KEYWORDS: Charged-particle lithography, Optics manufacturing, Photomasks, Projection systems, Metrology, Optical alignment, Semiconducting wafers, Monochromatic aberrations, Wafer-level optics, Lithography

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