Accurate form measurements for aspherical and freeform surfaces are in high demand and tilted-wave interferometry is a promising method to fulfill this need. However, interferometric form measurement methods for curved surfaces are sensitive to positioning errors of the surface under test, especially along the optical axis. To investigate the influence, we have measured the drift of two different positioning hexapods and simulated the influence of the drift on the form reconstruction of the surface under test. The simulation results were compared to repeated form measurements of a surface under test with the tilted-wave interferometer.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.