Two technologies for MEMS (Microelectromechanical Systems) scale cell formation are discussed. First, the
fabrication of planar alkaline cell batteries compatible with MEMS scale power storage applications is shown. Both mm
scale and sub-mm scale individual cells and batteries have been constructed. The chosen coplanar electrode geometry
allows for easy fabrication of series connected cells enabling higher voltage while simplifying the cell sealing and
electrode formation. The Zn/Ag alkaline system is used due to the large operating voltage, inherent charge capacity,
long shelf life, and ease of fabrication. Several cells have been constructed using both plated and spun-on silver. The
plated cells are shown to be limited in performance due to inadequate surface area and porosity; however, the cells made
from spun-on colloidal silver show reasonable charge capacity and power performance with current densities of up to
200 uA/mm2 and charge capacities of up to 18 mA-s/mm2. Second, a new printing method for interdigitated 3-D cells is
introduced. A microfluidic printhead capable of dispensing multiple materials at high resolution and aspect ratio is
described and used to form fine interdigitated cell features which show >10 times improvement in energy density.
Representative structures enabled by this method are modeled, and the energy and power density improvements are
reported.
A case-based reasoning (CBR) knowledge base has been incorporated into a Micro-Electro-Mechanical Systems
(MEMS) design tool that uses a multi-objective genetic algorithm (MOGA) to synthesize and optimize conceptual
designs. CBR utilizes previously successful MEMS designs and sub-assemblies as building blocks stored in an indexed
case library, which serves as the knowledge base for the synthesis process. Designs in the case library are represented in
a parameterized object-oriented format, incorporating MEMS domain knowledge into the design synthesis loop as well
as restrictions for the genetic operations of mutation and crossover for MOGA optimization. Reasoning tools locate
cases in the design library with solved problems similar to the current design problem and suggest promising conceptual
designs which have the potential to be starting design populations for a MOGA evolutionary optimization process, to
further generate more MEMS designs concepts. Surface micro-machined resonators are used as an example to introduce
this integrated MEMS design synthesis process. The results of testing on resonator case studies demonstrate how the
combination of CBR and MOGA synthesis tools can help increase the number of optimal design concepts presented to
MEMS designers.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.