KEYWORDS: Buildings, Inspection equipment, Electron beam lithography, Research facilities, Electron microscopy, Computing systems, Microscopes, Photography, Molecular imaging, Imaging systems
Buildings for nanoscience research have become increasingly popular on university campuses. Such research facilities provide numerous opportunities in terms of attracting research groups from diverse educational and scientific backgrounds that allow for cross pollination of various research disciplines and are on the forefront of scientific discovery and innovation. The California Nanosystems Institute (CNSI) that is currently under construction in the University of California campus at Los Angeles will be such a state-of-the-art research facility. The design of this facility had to overcome a number of challenges, in order to assure that the vibration environment would be acceptable for the range of anticipated research activities and developing space layouts that address incompatible uses.
Historically, clean room acoustical performance has been specified in the 65 dBA or NC-60 range. As line width geometries continue to shrink and metrology tools are introduced into the clean room at an increasing rate, some consideration on what constitutes appropriate and achievable clean room acoustical performance is long overdue. This paper addresses acoustical performance limitations for clean rooms under various air recirculation systems. The issue of what constitutes practical acoustical limits is also discussed. These limitations are put into the context of manufacturer specifications for metrology tools while addressing resulting consequences.
Conference Committee Involvement (1)
Buildings for Nanoscale Research and Beyond
31 July 2005 | San Diego, California, United States
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.