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Chikato Kaga
at Lasertec USA Inc
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 21 November 2023 Presentation + Paper
Die-to-database inspections of optical patterned masks
Christopher Wieland, Kristy Kormondy, Annelise Beck, Britain Smith, Firoz Ghadiali, Jun Kim, Frank Abboud, Tetsuya Sendoda, Naonari Kondo, Tomohiro Imahoko, Jeoung Kim, Chikato Kaga, Arosha Goonesekera, Wonil Cho, Sankaranarayanan Paninjath, Saikiran Madhusudhan, Prakash Deep, Shivam Nln, Sasidhara Reddy, Ranganadh Peesapati
Proceedings Volume 12751, 1275105 (2023) https://doi.org/10.1117/12.2688267
KEYWORDS: Inspection, Defect inspection, Photomasks, Optical inspection, Semiconducting wafers, Printing, Image processing, Detection and tracking algorithms, Defect detection
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