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Chenyang Mei
at Huazhong Univ of Science and Technology
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Publications (1)
Proceedings Article | 21 January 2022 Paper
Design of double-layer silicon nitride-based optical phased array
Chenyang Mei, Qiang Liu, Qingzhong Huang
Proceedings Volume 12154, 121540K (2022) https://doi.org/10.1117/12.2622441
KEYWORDS: Silicon, Phased array optics, Waveguides, Low pressure chemical vapor deposition, LIDAR, Antennas, Wave propagation, Optical design, Diffraction, Absorption
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