Ms. Catherine A. Baker Profile

Catherine A. Baker

MaskCAD Manager

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Publications (3)

Proceedings Article | 1 September 1998 Paper

Designing dual-trench alternating phase-shift masks for 140-nm and smaller features using 248-nm KrF and 193-nm ArF lithography

John Petersen, Robert Socha, Alex Naderi, Catherine Baker, Syed Rizvi, Douglas Van Den Broeke, Nishrin Kachwala, J. Fung Chen, Thomas Laidig, Kurt Wampler, Roger Caldwell, Susumu Takeuchi, Yoshiro Yamada, Takashi Senoh, Martin McCallum

Proceedings Volume 3412, (1998) https://doi.org/10.1117/12.328861

KEYWORDS: Etching, Optical proximity correction, Diffraction, Photomasks, Reticles, Phase shifts, Quartz, Anisotropic etching, Lithography, Phase measurement

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Proceedings Article | 15 February 1994 Paper

CORE 2564 process optimization with the APTCON 4045

Alan Golob, Greg Mullins, Catherine Baker, C. Edward Franks, Asao Shikata

Proceedings Volume 2087, (1994) https://doi.org/10.1117/12.167286

KEYWORDS: Critical dimension metrology, Chemistry, Photomask technology, Process control, Robots, Etching, Reticles, Safety, Optics manufacturing, Control systems

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Proceedings Article | 26 March 1993 Paper

Performance testing and results of the first Etec CORE-2564

C. Edward Franks, Asao Shikata, Catherine Baker

Proceedings Volume 1809, (1993) https://doi.org/10.1117/12.142129

KEYWORDS: Composites, Reticles, Tolerancing, Edge roughness, Photomasks, Particles, Opacity, Data analysis, Electron beams, Photoresist materials

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