In this paper, a method to detect internal pocks and bubbles of optical elements based on laser line
source scanning is proposed. In dark field environment, a laser line source is used to illuminate from
one side of the glass under test, a high-resolution CCD camera is used to take pictures in front of the
glass sample. Images which contain information of defects are acquired through rough scanning and
accurate scanning. Accurate three-dimensional coordinates of the internal defects are acquired after
image processing, which descript the characteristic information of internal defects quantificationally.
Compared with the microscope imaging measurement, this proposed detection of defects in optics
based on laser line source scanning has a relative aberration smaller than 2%. In addition, the detection
time is approximately reduced to 20 minutes from 1 hour dramatically. The analysis indicates that the
error of the position of defects is much smaller than the size of them, which means the position of the
defects can be acquired accurately by this approach.
In this paper, a method to detect internal pocks and bubbles of optical elements based on laser line
source scanning is proposed. In dark field environment, a laser line source is used to illuminate from
one side of the glass under test, a high-resolution CCD camera is used to take pictures in front of the
glass sample. Images which contain information of defects are acquired through rough scanning and
accurate scanning. Accurate three-dimensional coordinates of the internal defects are acquired after
image processing, which descript the characteristic information of internal defects quantificationally.
Compared with the microscope imaging measurement, this proposed detection of defects in optics
based on laser line source scanning has a relative aberration smaller than 2%. In addition, the detection
time is approximately reduced to 20 minutes from 1 hour dramatically. The analysis indicates that the
error of the position of defects is much smaller than the size of them, which means the position of the
defects can be acquired accurately by this approach.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.