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Bastian Trauter
at Carl Zeiss SMT AG
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 4 March 2010 Paper
Performance of FlexRay: a fully programmable illumination system for generation of freeform sources on high NA immersion systems
Melchior Mulder, André Engelen, Oscar Noordman, Gert Streutker, Bert van Drieenhuizen, Cas van Nuenen, Wilfred Endendijk, Jef Verbeeck, Wim Bouman, Anita Bouma, Robert Kazinczi, Robert Socha, Dirk Jürgens, Joerg Zimmermann, Bastian Trauter, Joost Bekaert, Bart Laenens, Daniel Corliss, Greg McIntyre
Proceedings Volume 7640, 76401P (2010) https://doi.org/10.1117/12.845984
KEYWORDS: Mirrors, Diffractive optical elements, Fiber optic illuminators, Source mask optimization, Imaging systems, Electroluminescence, Polarization, Semiconducting wafers, Photomasks, Light
Proceedings Article | 29 August 2008 Paper
Analysis of the uniqueness of an inverse grating characterization method
Proceedings Volume 7065, 70650T (2008) https://doi.org/10.1117/12.793688
KEYWORDS: Diffraction gratings, Diffraction, Electromagnetism, Optimization (mathematics), Inverse problems, Refractive index, Inverse optics, Shape analysis, Optical components, Scatterometry
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